Ultra-pure monosilane and semiconducting polysilicon

Microelectronics (integrated circuit fabrication), optoelectronics, power electronics, solar energy (solar battery production).
 

Original environmentally safe chlorine free process of ultra pure monosilane and polysilicon production was developed. The process consists of the following stages:
·-triethoxysilane production and purification,
·- triethoxysilane disproportionation with ultra pure monosilane and tetraethoxysilane production,
·  ultra pure monosilane pyrolysis and polysilicon production,
·  tetraethoxysilane hydrolysis in order to obtain ultra pure silicon containing products (silica sol, silicon dioxide etc ).